Title :
Correction of Nonlinearity in High-Resolution Nano-Displacement Measurements
Author :
Olyaee, Saeed ; Hamedi, Samaneh
Author_Institution :
Dept. of Electr. Eng., Shahid Rajaee Teacher Training Univ., Tehran
Abstract :
In this paper, a simple method to reduce the nonlinearity in the high-resolution nano-displacement measuring system using a modified laser interferometer is presented. By using a retarder plate and improved optical head, in additional to the nonlinearity compensation, the resolution of the displacement measurement is doubled and quadrupled compared to the conventional three- and two-mode laser interferometers, respectively. In the particular case, the nonlinearity of 18.4 nm is reduced to a value of 140 pm.
Keywords :
displacement measurement; light interferometry; measurement by laser beam; optical retarders; high-resolution nanodisplacement measurement; laser interferometer; nonlinearity correction; optical head; retarder plate; Displacement measurement; High speed optical techniques; Optical interferometry; Optical mixing; Optical polarization; Optical refraction; Optical retarders; Optical sensors; Optical variables control; Signal resolution; compensator; heterodyne; interferometer; laser; nano-displacement; nonlinearity;
Conference_Titel :
High Capacity Optical Networks and Enabling Technologies, 2008. HONET 2008. International Symposium on
Conference_Location :
Penang
Print_ISBN :
978-1-4244-2960-8
Electronic_ISBN :
978-1-4244-2961-5
DOI :
10.1109/HONET.2008.4810220
