Title :
Modeling of inter-digitated transducer for high-order contour mode resonators
Author :
Renyuan Wang ; Bhave, Sunil A. ; Bhattacharjee, Kushal
Author_Institution :
ECE Dept., Cornell Univ., Ithaca, NY, USA
Abstract :
LiNbO3 contour-mode resonators (CMR) have the potential to fulfill the requirement of multi-frequency wide-bandpass filters. For CMRs, the position of the inter-digitated transducer (IDT) fingers can significantly affect their performance [1], as the reflection of acoustic waves at the sharply defined mechanical boundaries cause strong interferences of these waves. In this paper, we present a model that analytically & intuitively explains the behavior of CMRs with IDT at the mechanical anti-nodes (AN) of the targeted mechanical mode vs. with IDT at the nodes (N). The model is then verified with experimental results.
Keywords :
acoustic transducers; acoustic waves; acoustic waves; high-order contour mode resonators; interdigitated transducer; mechanical antinodes; mechanical boundaries; mechanical mode; multifrequency wide-bandpass filters; Acoustic waves; Electrodes; Frequency response; Piezoelectric transducers; Resonator filters; Thumb; Lithium Niobate; contour mode resonator; delta function model; inter-digitated transducer;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0491