A V-/W-band 0.18-μm CMOS phase shifter MMIC with 180°-300° phase tuning range

This letter presents the design and implementation of a continuous phase shifter MMIC using a 0.18-μm standard CMOS process. It consists of five stages of reflection-type phase shifter (RTPS), where each stage contains a over-coupling broadside coupler loaded with accumulation-mode MOSFET varactors. The measured maximum phase tuning range reaches 302° at 40 GHz and remains greater than 180° up to 100 GHz. Within 40-100 GHz, the average insertion loss is 13 dB, while the loss variation across the phase tuning range is ±4.3 dB at 40 GHz, and decreases to ± 2.5 dB at frequencies beyond 60 GHz. This chip has a compact size of 0.36×0.5 mm² and consumes zero DC power.