Design of a Silicon-Micro Piezoresistive Multi-ranged Accelerometer

Aim at the problems that the requirements of acceleration parameter test in high dynamic range in the application of conventional ammunition guidance, the limits of conventional ammunition space and size, and the errors and great inconvenience brought by using several accelerometers with different ranges, a piezoresistive silicon-micro multi-ranged accelerometer containing four accelerometer units (10g, 100g, 500g, and 10000g) was proposed and designed in this paper. Based on static and dynamic simulation analysis, the static and dynamic characteristics of the processed and packaged piezoresistive silicon-micro multi-ranged accelerometer were calibrated. The calibration results show that the multi-ranged micro accelerometer has good static and dynamic characteristics, and can meet various testing and controlling requirements under different working environment, and can achieve effectively multi-parameters measurement and multi-function control.