• DocumentCode
    3095113
  • Title

    A new triply rotated quartz cut for the fabrication of low loss SAW filters

  • Author

    Ballandras, Sylvain ; Briot, E. ; Solal, M. ; Steichen, W. ; Doisy, M. ; Hodé, J.M.

  • Author_Institution
    Univ. de Franche-Comte, Besancon, France
  • Volume
    1
  • fYear
    2000
  • fDate
    36800
  • Firstpage
    241
  • Abstract
    Analysis of the Quartz properties shows the existence of unexplored angular domains for which Rayleigh waves can be efficiently excited, exhibiting physical characteristics better than the ones of the (ST,X) cut. This paper presents a family of quartz cuts allowing significant improvements of SAW devices on Quartz. Experiments have been performed, confirming the above mentioned theoretical predictions. A filter built on this cut is presented showing the interest of the proposed crystal orientations
  • Keywords
    Rayleigh waves; crystal orientation; quartz; surface acoustic wave filters; Rayleigh wave; SAW filter; SiO2; crystal orientation; fabrication; triply rotated quartz cut; Acoustic waves; Beam steering; Fabrication; Frequency; Resonator filters; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Surface treatment; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2000 IEEE
  • Conference_Location
    San Juan
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-6365-5
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2000.922548
  • Filename
    922548