DocumentCode
3095113
Title
A new triply rotated quartz cut for the fabrication of low loss SAW filters
Author
Ballandras, Sylvain ; Briot, E. ; Solal, M. ; Steichen, W. ; Doisy, M. ; Hodé, J.M.
Author_Institution
Univ. de Franche-Comte, Besancon, France
Volume
1
fYear
2000
fDate
36800
Firstpage
241
Abstract
Analysis of the Quartz properties shows the existence of unexplored angular domains for which Rayleigh waves can be efficiently excited, exhibiting physical characteristics better than the ones of the (ST,X) cut. This paper presents a family of quartz cuts allowing significant improvements of SAW devices on Quartz. Experiments have been performed, confirming the above mentioned theoretical predictions. A filter built on this cut is presented showing the interest of the proposed crystal orientations
Keywords
Rayleigh waves; crystal orientation; quartz; surface acoustic wave filters; Rayleigh wave; SAW filter; SiO2; crystal orientation; fabrication; triply rotated quartz cut; Acoustic waves; Beam steering; Fabrication; Frequency; Resonator filters; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Surface treatment; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2000 IEEE
Conference_Location
San Juan
ISSN
1051-0117
Print_ISBN
0-7803-6365-5
Type
conf
DOI
10.1109/ULTSYM.2000.922548
Filename
922548
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