• DocumentCode
    309516
  • Title

    Energy trapping in bulk acoustic wave composite resonator

  • Author

    Mansfeld, G.D.

  • Author_Institution
    Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
  • fYear
    1996
  • fDate
    5-7 Mar 1996
  • Firstpage
    21
  • Lastpage
    24
  • Abstract
    The analytical approach to the problem of energy trapping in bulk acoustic wave composite resonators is developed. It is based on a standard system of wave equations and boundary conditions for adjacent to resonator three layer structure-relatively thick layer of the substrate, thin metal electrode deposited onto its surface and the layer of piezoelectric film. The dispersion equation is solved to find small components of the wave vector in the direction in the plane of the structure outside the resonator. The obtained formula describes the attenuation of the wave in the region close to resonator. This expression is purely analytic and does not require matching procedure in calculations. The situation corresponding to microwave bulk acoustic wave resonators structures is discussed. In particular the developed approach at least qualitively explains surprisingly perfect energy trapping which exists in almost all microwave composite resonators
  • Keywords
    bulk acoustic wave devices; boundary conditions; bulk acoustic wave composite resonator; dispersion equation; energy trapping; microwave BAW resonators; piezoelectric film layer; pure longitudinal mode; thin metal electrode; three layer structure; transverse components; wave equations; wave vector;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    European Frequency and Time Forum, 1996. EFTF 96., Tenth (IEE Conf. Publ. 418)
  • Conference_Location
    Brighton
  • ISSN
    0537-9989
  • Print_ISBN
    0-85296-661-X
  • Type

    conf

  • DOI
    10.1049/cp:19960004
  • Filename
    583533