Title :
Energy distribution in a quartz resonator
Author :
Rösler, U. ; Ruile, W. ; Wagner, K. Ch ; Johannes, T.W. ; Scholl, G. ; Weigel, R.
Author_Institution :
Siemens Matsushita Components GmbH & Co. KG, Munchen, Germany
Abstract :
We present a theoretical analysis of the acoustical energy distribution in a surface acoustic wave (SAW) test resonator on the 34° cut of quartz. To calculate the energy density at each point for a known voltage, we chose a combination of three different methods: a P-Matrix algorithm for the longitudinal direction, a Stack-Matrix formalism across the aperture of the resonator and a Partial Wave Method normal to the substrate surface. We determined the distribution of energy in all three dimensions and located the peak stress at the metallization-vacuum interface
Keywords :
acoustic intensity; failure analysis; matrix algebra; surface acoustic wave resonators; 34° cut; 450 MHz; P-matrix algorithm; SAW test resonator; SiO2; acoustical energy distribution; energy density; energy distribution; failure mechanism; metallization-vacuum interface; partial wave method; peak stress; quartz resonator; stack-matrix formalism; two port resonator; Acoustic testing; Acoustic waves; Apertures; Failure analysis; Metallization; Stress; Surface acoustic wave devices; Surface acoustic waves; Surface treatment; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.583766
