Accurate determination of thin film properties using SAW differential delay lines

Author

Knapp, Matthias ; Jager, Philipp ; Grunauer, Gerold ; Scheinbacher, Gunter ; Bleyl, Ingo ; Reindl, Leonhard M.

Author_Institution

TDK Corp., Munich, Germany

fYear

2013

fDate

21-25 July 2013

Firstpage

1704

Lastpage

1707

Abstract

We have investigated a method to accurately determine elastic properties of thin films. For this purpose the phase velocity of a layered system is calculated using surface acoustic wave (SAW) differential delay lines on LiNbO₃ substrates. The phase velocity can be calculated with an accuracy of Δv_ph = ±0.5m/s. The material parameters density, elastic constant (c₁₁ and c₄₄) and their temperature coefficients TC(c₁₁) and TC(c₄₄) of Si₃N₄ thin film have been determined. They could be extracted by fitting them to the calculated phase velocity of the layered system Si₃N₄/LiNbO₃. Furthermore, the influence of deposition conditions on the material tensor data has been studied.

Keywords

elastic constants; elasticity; silicon compounds; surface acoustic waves; thin films; LiNbO₃; SAW; Si₃N₄; elastic constant; elastic properties; material property; material tensor; phase velocity; surface acoustic wave; thin film properties; Delay lines; Dispersion; Lithium niobate; Substrates; Surface acoustic waves; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0434

Filename

6724988