Optimized application of antenna structures in a WLR monitoring program [IC testing]

Author

Fazekas, Josef ; Asam, Wilhelm ; Von Hagen, Jochen

Author_Institution

Semicond. Div., Siemens AG, Munich, Germany

fYear

1997

fDate

13-16 Oct 1997

Firstpage

31

Lastpage

34

Abstract

When using antenna structures in a wafer-level reliability production monitoring program, we must take into account some restrictive conditions with regard to the available space for the required test structures and the time allowed for testing them. The purpose of this investigations was to find arguments for efficient selection of test structures and an appropriate choice of evaluation tests

Keywords

integrated circuit reliability; integrated circuit testing; integrated circuit yield; monitoring; optimisation; production testing; IC test; WLR monitoring program; antenna structures; evaluation tests; optimized antenna test structures; test structure selection; test structure space; testing time; wafer-level reliability production monitoring program; Antenna measurements; BiCMOS integrated circuits; Boundary conditions; Building materials; CMOS process; Condition monitoring; Feedback; Flow production systems; Semiconductor device testing; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Reliability Workshop Final Report, 1997 IEEE International

Conference_Location

Lake Tahoe, CA

Print_ISBN

0-7803-4205-4

Type

conf

DOI

10.1109/IRWS.1997.660277

Filename

660277