DocumentCode
3095789
Title
70 kHz-145 GHz broadband S-parameter measurements: Calibration and verification possibilities
Author
Martens, J. ; Roberts, T. ; Noujeim, Karam ; Reyes, S.
Author_Institution
Anritsu Co., Morgan Hill, CA, USA
fYear
2012
fDate
4-7 Dec. 2012
Firstpage
433
Lastpage
435
Abstract
As wider bandwidth S-parameter measurements are used for device modeling and other characterizations, it may be appropriate to revisit some assumptions about calibration and verification models. For fixtured, on-wafer and coaxial measurements in the range up to 150 GHz, we will examine load standard and related model fitting behavior for some common technologies, reflection standard behaviors and the appropriateness of mismatched lines as verification elements. Some of the element models appear to require minor modifications but otherwise reasonable performance was observed including residual source match and directivity values well in excess of 30 dB across the frequency range. The above efforts allow for an initial uncertainty calculation whose behaviors do not differ dramatically from that seen in the previous generation of broadband measurements.
Keywords
S-parameters; calibration; microwave measurement; semiconductor device models; broadband S-parameter measurements; calibration; coaxial measurements; device modeling; frequency 70 kHz to 145 GHz; on-wafer measurements; reflection standard behaviors; residual source match; verification models; Calibration; Inductance; Load modeling; Scattering parameters; Standards; Transmission line measurements; Uncertainty; S-parameters; VNA; calibration; verification;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference Proceedings (APMC), 2012 Asia-Pacific
Conference_Location
Kaohsiung
Print_ISBN
978-1-4577-1330-9
Electronic_ISBN
978-1-4577-1331-6
Type
conf
DOI
10.1109/APMC.2012.6421622
Filename
6421622
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