DocumentCode
3096135
Title
Kinetics and radiative processes in Xe/I/sub 2/ inductively coupled RF discharges at low pressure
Author
Barnes, Paul N. ; Verdeyen, J.T. ; Kushner, Mark J.
Author_Institution
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
fYear
1996
fDate
3-5 June 1996
Firstpage
269
Abstract
Summary form only given. The environmental concern over the presence of mercury in conventional fluorescent lamps has motivated research into alternative electrically efficient near UV plasma lighting sources. One such candidate is multi-wavelength UV emission from Xe/I/sub 2/ mixtures, including excimer radiation from XeI* at 253 nm. Previous studies of the XeI* system were performed at high pressures and were intended for laser applications. Practical Xe/I/sub 2/ lamps are likely to operate in the 0.5-10 Torr regime and use electrodeless excitation to avoid issues related to electrode erosion by the halogen. In this paper, we report on an experimental investigation of low pressure, inductively coupled plasmas sustained in Xe/I/sub 2/ mixtures. The goals of this work are to characterize the UV emission and determine excitation mechanisms in a parameter space of interest to lighting applications.
Keywords
xenon; 0.5 to 10 torr; 253 nm; UV emission; Xe-I/sub 2/; Xe/I/sub 2/; electrodeless excitation; excimer radiation; excitation mechanisms; fluorescent lamps; inductively coupled RF discharge; kinetics; laser applications; lighting applications; low pressure discharges; multi-wavelength UV emission; near UV plasma lighting sources; radiative processes; Electromagnetic coupling; Electron optics; Fluorescent lamps; Kinetic theory; Laser excitation; Optical interferometry; Plasma applications; Radio frequency; Spectroscopy; Stimulated emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1996. IEEE Conference Record - Abstracts., 1996 IEEE International Conference on
Conference_Location
Boston, MA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3322-5
Type
conf
DOI
10.1109/PLASMA.1996.551526
Filename
551526
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