Title :
Chemical sensor based on surface acoustic wave resonator incorporating Langmuir-Blodgett films
Author :
Nomura, Tooru ; Takebayashi, Masaaki ; Furukawa, Shoji
Author_Institution :
Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A one-port SAW resonator incorporating Langmuir-Blodgett (LB) films has been investigated for a sensing element of chemical sensor. A 90 MHz SAW chemical sensor have been fabricated on ST cut quartz substrate and one-port resonator configuration have been used as a sensing element. Selective coatings have been deposited by the Langmuir-Blodgett method. The resonance frequency and the Q value have been measured as sensor response. Experimental results shown that the Q value and the resonance frequency of the one-port SAW resonator varied with the mass loading on SAW device surface. Especially, it was found that the measurement of Q value is very suitable for SAW sensor response
Keywords :
Langmuir-Blodgett films; Q-factor; chemical sensors; surface acoustic wave resonators; surface acoustic wave sensors; 90 MHz; Langmuir-Blodgett film; Q value; ST cut quartz substrate; SiO2; chemical sensor; mass loading; one-port SAW resonator; resonance frequency; selective coating; surface acoustic wave resonator; Acoustic waves; Chemical elements; Chemical sensors; Coatings; Frequency measurement; Q measurement; Resonance; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.583999
