Surface micromachined ultrasound transducers in CMOS technology

Author

Eccardt, Peter-Christian ; Niederer, K. ; Scheiter, T. ; Hierold, C.

Author_Institution

Siemens AG, Munich, Germany

Volume

2

fYear

1996

fDate

3-6 Nov 1996

Firstpage

959

Abstract

The paper presents a new technology for electrostatically driven ultrasound transducers, processed by only a few additional steps within a standard BiCMOS process. Measurements of the test structures showed good acoustic properties especially for application in fluids. The full integration with the electronic circuit allows the realization of a new generation of one- and two dimensional arrays for many different applications like low cost phased arrays or 2D arrays for specific medical applications like skin diagnosis

Keywords

BiCMOS analogue integrated circuits; biomedical equipment; biomedical ultrasonics; membranes; micromachining; microsensors; ultrasonic transducer arrays; 1 to 25 MHz; 2D arrays; CMOS technology; acoustic properties; electronic circuit; electrostatically driven US transducers; fluids; integration; low cost phased arrays; medical applications; one-dimensional arrays; skin diagnosis; standard BiCMOS process; surface micromachined ultrasound transducers; two-dimensional arrays; Acoustic measurements; Acoustic transducers; BiCMOS integrated circuits; CMOS technology; Electrostatic measurements; Paper technology; Phased arrays; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE

Conference_Location

San Antonio, TX

ISSN

1051-0117

Print_ISBN

0-7803-3615-1

Type

conf

DOI

10.1109/ULTSYM.1996.584150

Filename

584150