DocumentCode
3097155
Title
SAW resonators using electrostrictive effect
Author
Alzuaga, Sebastien ; Daniau, W. ; Baron, T. ; Martin, G. ; Salut, Roland ; Ballandras, S. ; Defay, E.
Author_Institution
Time & Freq. Dept., FEMTO-ST Inst., Besancon, France
fYear
2013
fDate
21-25 July 2013
Firstpage
749
Lastpage
752
Abstract
We report on the study of tunable surface acoustic waves (SAW) resonators fabricated on SrTiO3 (STO) substrate. Linear electromechanical coupling (induced “piezoelectric” coupling) is realized through electrostriction effect by applying a strong electric bias field in addition to the small signal electric and mechanical fields. Resonators have been fabricated at 2.2 GHz, showing an interesting tunability for variable bandwith filters or controlled sources.
Keywords
UHF filters; electric fields; strontium compounds; surface acoustic wave resonators; titanium compounds; SAW resonators; SrTiO3; controlled sources; electric bias field; electrostrictive effect; frequency 2.2 GHz; linear electromechanical coupling; mechanical fields; piezoelectric coupling; small signal electric fields; tunable surface acoustic waves resonators; variable bandwith filters; Electrodes; Electrostriction; Resonant frequency; Substrates; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location
Prague
ISSN
1948-5719
Print_ISBN
978-1-4673-5684-8
Type
conf
DOI
10.1109/ULTSYM.2013.0193
Filename
6725072
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