Design of a position sensitive integrated multidetector

In this paper the design of an integrated Position Sensitive Detector, for low energy (up to 100 eV) charged particles, is described. It consists of a linear array of electron sensing electrodes connected to an array of amplifiers (detection circuit) and counters (read-out circuit), all integrated onto a single CMOS chip. The operation of the detector is controlled by on-chip control logic. To achieve the counting of individual charged particles or photons the integrated circuit is coupled with a microchannel plate electron multiplier. The detector offers significant advantages over the existing detection systems