Effect of ionization on the bounded and free presheath in magnetic flowing plasmas

Summary form only given. A fluid model is suggested to analyze the effect of ionization in the bounded and free presheath in magnetized flowing plasmas, which are common features in the edge plasma of fusion devices and in the processing plasma of etching devices. Analytic solutions are derived from one-dimensional fluid equations with arbitrary ionization ratio (/spl beta/) and arbitrary shear viscosity (/spl alpha/). The ionization source is normalized by a free transport source due to the cross field diffusion and the shear viscosity is normalised by the (mass density/spl times/ cross-field diffusivity). Plasma density and flow velocity are obtained analytically in terms of position along the field line, the size of the bounded presheath, Mach number (M/sub /spl infin///spl equiv/V/sub d///spl radic/((ZT/sub e/+T/sub i//m/sub i/))), normalized viscosity (/spl alpha/), and the ionization ratio (/spl beta/). Analytic relations between the ratio (R) of the sheath current and the flow Mach number (M/sub /spl infin//) is determined.