Capacitive micromachined ultrasonic transducer (cMUT) array for the frequency range below 500 kHz

Author

Buhrdorf, A. ; Tebje, L. ; Ahrens, O. ; Glitza, O. ; Binder, J.

Author_Institution

Inst. for Microsensors, -Actuators, and -Syst., Bremen Univ., Germany

Volume

1

fYear

2000

fDate

36800

Firstpage

915

Abstract

A new capacitive micromachined ultrasonic transducer (cMUT) array for the frequency range up to 500 kHz has been fabricated and successfully tested. The new setup of the ultrasonic transducer array, the process flow, the simulation as well as a new concept for a further transducer type are major topics of this paper. The presented ultrasonic transducer has been fabricated on 4" (100) silicon wafers with conductive polycrystalline silicon as diaphragm and a perforated nickel structure as backplate. The perforated nickel backplate with a thickness between 10-20 μm has been realized by an electroplating process. The transducer array consists of groups of membranes. Each group realized by single anisotropic backside openings

Keywords

capacitive sensors; micromachining; ultrasonic transducer arrays; 500 kHz; Si(100) wafers; capacitive micromachined ultrasonic transducer array; conductive polycrystalline Si diaphragm; membranes; perforated Ni structure backplate; process flow; single anisotropic backside openings; Acoustic transducers; Air gaps; Anisotropic magnetoresistance; Biomembranes; Character generation; Electrodes; Resonance; Resonant frequency; Ultrasonic transducer arrays; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2000 IEEE

Conference_Location

San Juan

ISSN

1051-0117

Print_ISBN

0-7803-6365-5

Type

conf

DOI

10.1109/ULTSYM.2000.922690

Filename

922690