Multi-frequency CMUT arrays for imaging-therapy applications

Author

Kshirsagar, Abhijeet ; Chee, Ryan ; Sampaleanu, Alexander ; Forbrich, Alexander ; Rishi, Deepak ; Moussa, Walied ; Zemp, Roger J.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada

fYear

2013

fDate

21-25 July 2013

Firstpage

1991

Lastpage

1993

Abstract

Novel multi-frequency Capacitive Micromachined Ultrasound Transducer (CMUT) arrays with interlaced low and high-frequency elements are investigated for novel imaging-therapy applications. Our interlaced CMUTs are designed with device dimensions smaller than operating wavelengths. This permits low- and high-frequency CMUT cells to be interlaced monolithically on a scale smaller than the array wavelengths. This dense interlacing scheme thus offers the promise of co-registered dual-frequency-band operation with minimal deleterious grating lobes and with maximal overlap of low- and high-frequency beams.

Keywords

bioMEMS; biomedical transducers; biomedical ultrasonics; micromachining; ultrasonic therapy; capacitive micromachined ultrasound transducer; coregistered dual-frequency-band operation; dense interlacing scheme; high-frequency CMUT cells; high-frequency ultrasound beams; imaging-therapy applications; low-frequency CMUT cells; low-frequency ultrasound beams; multifrequency CMUT arrays; Acoustics; Electrodes; Etching; Imaging; Impedance matching; Transducers; Ultrasonic imaging; 2D arrays; 3D ultrasound imaging; CMUTs; MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2013 IEEE International

Conference_Location

Prague

ISSN

1948-5719

Print_ISBN

978-1-4673-5684-8

Type

conf

DOI

10.1109/ULTSYM.2013.0508

Filename

6725106