Title :
Infra-Red Thermography for spatially resolved measurements of the temperature distribution on the Acoustic Wave devices
Author :
Roux-Marchand, T. ; Elmazria, O. ; Sarry, F.
Author_Institution :
Inst. Jean Lamour, Univ. de Lorraine, Vandoeuvre-les-Nancy, France
Abstract :
The continuous miniaturization of surface acoustic wave (SAW) devices linked with operating frequency increase leads to localized heating which can affect the lifetime and the efficiency. In the case of Surface Acoustic Wave (SAW) chips, it is moreover difficult to directly visualize the acoustic wave because of its velocity and its relative low amplitude (some nm). In this paper, we present a method based on infrared observation and leading to observe the propagation path of the SAW with a non-destructive and non-contacting protocol. We show that this technique allows to image the heating of the chip with a good resolution leading to improve the design of SAW devices including, resonators and delay line.
Keywords :
acoustic wave propagation; heating; infrared imaging; surface acoustic wave delay lines; surface acoustic wave resonators; SAW delay line; SAW devices; SAW resonators; infrared thermography; localized heating; propagation; surface acoustic wave chips; surface acoustic wave devices; temperature distribution; velocity; Heating; Propagation losses; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Infrared measurement; SAW imaging; Surface Acoustic Wave (SAW); non destructive measurment;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0494