Realization of Electrostatic Suspension by Using a Variable Capacitor

A novel control method of electrostatic actuators is applied to electrostatic suspension. This method uses a variable capacitor, which is connected with an electrostatic actuator in series. A constant high voltage is applied to this connection. The voltage applied to the actuator is controlled by varying the capacitance of the connected capacitor. An experimental apparatus was fabricated for studying the controllability of the electrostatic force by the proposed method. The experimental results showed that electrostatic force can be controlled both statically and dynamically. Another apparatus was fabricated for checking the feasibility of electrostatic suspension. Noncontact electrostatic suspension was achieved with the developed control system.