Full three-dimensional motion characterization of a gimballed electrostatic microactuator

Author

Rembe, Christian ; Muller, Lilac ; Muller, Richard S. ; Howe, Roger T.

Author_Institution

Berkeley Sensor & Acuator Center, California Univ., Berkeley, CA, USA

fYear

2001

fDate

2001

Firstpage

91

Lastpage

98

Abstract

Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of more effective microdevice development is high-speed visualization of the dynamics of MEMS structures. We have developed and employed a full three-dimensional-motion-characterization system for MEMS to observe the response of a gimballed microactuator, a multi-degree-of-freedom microdevice

Keywords

design engineering; electronic design automation; electrostatic actuators; motion estimation; semiconductor device models; semiconductor device testing; 3D motion characterization; 3D-motion-characterization system; MEMS; MEMS structure dynamics; MEMS testing; design; device behavior; engineering development; gimballed electrostatic microactuator; gimballed microactuator; high-speed visualization; material properties; microdevice development; microdevice dynamics; multi-degree-of-freedom microdevice; reliable microelectromechanical systems; simulation; system parameters; testing methods; Design engineering; Feedback; Material properties; Microactuators; Microelectromechanical systems; Micromechanical devices; Process design; Reliability engineering; System testing; Visualization;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International

Conference_Location

Orlando, FL

Print_ISBN

0-7803-6587-9

Type

conf

DOI

10.1109/RELPHY.2001.922887

Filename

922887