Title :
Full three-dimensional motion characterization of a gimballed electrostatic microactuator
Author :
Rembe, Christian ; Muller, Lilac ; Muller, Richard S. ; Howe, Roger T.
Author_Institution :
Berkeley Sensor & Acuator Center, California Univ., Berkeley, CA, USA
Abstract :
Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of more effective microdevice development is high-speed visualization of the dynamics of MEMS structures. We have developed and employed a full three-dimensional-motion-characterization system for MEMS to observe the response of a gimballed microactuator, a multi-degree-of-freedom microdevice
Keywords :
design engineering; electronic design automation; electrostatic actuators; motion estimation; semiconductor device models; semiconductor device testing; 3D motion characterization; 3D-motion-characterization system; MEMS; MEMS structure dynamics; MEMS testing; design; device behavior; engineering development; gimballed electrostatic microactuator; gimballed microactuator; high-speed visualization; material properties; microdevice development; microdevice dynamics; multi-degree-of-freedom microdevice; reliable microelectromechanical systems; simulation; system parameters; testing methods; Design engineering; Feedback; Material properties; Microactuators; Microelectromechanical systems; Micromechanical devices; Process design; Reliability engineering; System testing; Visualization;
Conference_Titel :
Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-6587-9
DOI :
10.1109/RELPHY.2001.922887
