Non-destructive resonant frequency measurement on MEMS actuators

Author

Smith, Norman F. ; Tanner, Danelle M. ; Swanson, Scot E. ; Miller, Samuel L.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

fYear

2001

fDate

2001

Firstpage

99

Lastpage

105

Abstract

Resonant frequency measurements provide useful insight into the repeatability of microelectromechanical systems (MEMS) manufacturing processes. Several techniques are available for making this measurement. All of these techniques however, tend to be destructive to devices which experience sliding friction, since they require the device to be operated at resonance. A nondestructive technique is presented which does not require the device to be continually driven at resonance. This technique was demonstrated on a variety of MEMS actuators

Keywords

frequency measurement; microactuators; nondestructive testing; resonance; semiconductor device measurement; sliding friction; MEMS actuators; MEMS manufacturing processes; destructive techniques; microelectromechanical systems manufacturing processes; nondestructive resonant frequency measurement; nondestructive technique; repeatability; resonance operation; resonant frequency measurements; sliding friction; Actuators; Electrical resistance measurement; Equations; Frequency measurement; Manufacturing; Mass production; Microelectronics; Micromechanical devices; Resonance; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International

Conference_Location

Orlando, FL

Print_ISBN

0-7803-6587-9

Type

conf

DOI

10.1109/RELPHY.2001.922888

Filename

922888