Research on Tilt Sensor Technology

This paper summarizes and classifies the theory and technology of various tilt sensors, introduces solid pendulum tilt sensors, liquid pendulum tilt sensors, gas pendulum tilt sensors, micro-electro-mechanical system (MEMS) tilt sensors, compounding tilt sensors, including several kinds of sensors developed by the research group, such as gas pendulum dual-axis tilt sensors, micro-machined gas pendulum dual-axis tilt sensors, micro-machined gas pendulum dual-axis tilt sensors restraining acceleration interference and so on; analyzes the theory, fundamental, configuration and advantages and disadvantages of all kinds of tilt sensors; points out the development directions and trends according to a great deal of materials analyzing and technology research.