Title :
Micromachined high-frequency ultrasound 2-dimensional array transducer
Author :
Liu, C.G. ; Zheng, Fei ; Chen, R.M. ; Ma, Tan ; Djuth, Frank T. ; Zhou, Qing F. ; Shung, K. Kirk
Author_Institution :
Geospace Res. Inc., El Segundo, CA, USA
Abstract :
Micromachining techniques have been developed and applied in fabricating high frequency piezoelectric composite 2-dimensional ultrasound array transducers. The array has 256 elements with the size of 105 μm by 105 μm. The kerf between elements is 5 μm. The center frequency is 52 MHz with the -6 dB bandwidth of 58%. As many as 98% elements are working. The pulse-echo responses have been measured with the testing system.
Keywords :
composite materials; echo; micromachining; piezoelectric transducers; ultrasonic transducer arrays; frequency 52 MHz; micromachining; piezoelectric composite two-dimensional ultrasound array transducers; pulse-echo responses; Acoustics; Arrays; Materials; Nickel; Pins; Transducers; Ultrasonic imaging;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0203
