Title :
Improving SRAM read/write margin with asymmetric halo MOSFET
Author :
Nii, Koji ; Yabuuchi, Makoto ; Fujiwara, Hidehiro ; Tsukamoto, Yasumasa ; Maekawa, Koji ; Igarashi, Motoshige
Author_Institution :
Renesas Electron. Corp., Japan
Abstract :
We propose SRAM bitcells with asymmetric halo implant dose MOSFET (AH-MOS) by introducing additional masks for halo implant steps. AH-MOS has different drain-source currents (Ids) between forward and reverse directions (Fig. 1). By implanting high and low dose for drain and source regions respectively, Ids flowing from drain to source (forward) gets larger than that from source to drain (reverse). Fig. 2 shows 6T SRAM bitcell with AH-MOS [1]. The current at pass-gate (PG), which consists of AH-MOS, flows bi-directionally in read and write mode. The pull-down (PD) is symmetric halo implant dose MOSFET (SH-MOS) due to unidirectional currents. The pull-up (PU) is also SH-MOS.
Keywords :
MOSFET; SRAM chips; AH-MOS; SH-MOS; SRAM bitcells; SRAM read-write margin; asymmetric halo implant dose MOSFET; drain-source currents; drain-source regions; pass-gate current; symmetric halo implant dose MOSFET; Arrays; Implants; Logic gates; MOS devices; MOSFET circuits; Random access memory; Resists;
Conference_Titel :
Semiconductor Device Research Symposium (ISDRS), 2011 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4577-1755-0
DOI :
10.1109/ISDRS.2011.6135267