DocumentCode
310029
Title
Mass-transported efficient microlenses in GaAs and GaP for integration with high-power diode lasers
Author
Liau, Z.L. ; Walpole, J.N. ; Mull, D.E. ; Hovey, D.L. ; DiNatale, W.F.
Author_Institution
Lincoln Lab., MIT, Lexington, MA, USA
Volume
1
fYear
1994
fDate
31 Oct-3 Nov 1994
Firstpage
67
Abstract
We describe the successful fabrication of the first mass-transported microlenses in GaAs, suitable for monolithic integration with lasers. We also describe a novel two-sided microlens in a GaP substrate, designed for high collection efficiency from a tapered laser and direct coupling to a single-mode fiber
Keywords
laser accessories; GaAs; GaP; collection efficiency; direct coupling; fabrication; high-power diode lasers; mass transport; microlenses; monolithic integration; single-mode fiber; tapered laser; Diode lasers; Etching; Fiber lasers; Gallium arsenide; Laboratories; Lenses; Microoptics; Optical coupling; Optical design; Solids;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location
Boston, MA
Print_ISBN
0-7803-1470-0
Type
conf
DOI
10.1109/LEOS.1994.586894
Filename
586894
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