Title :
Discussion Group Summary Reliability Test Structures
Author_Institution :
Keithley Instruments, Cleveland, OH
Keywords :
Circuit testing; Electromigration; Failure analysis; Instruments; Monitoring; Process control; Production; Qualifications; Random access memory; Size control;
Conference_Titel :
Integrated Reliability Workshop Final Report, 1997 IEEE International
Conference_Location :
Lake Tahoe, CA, USA
Print_ISBN :
0-7803-4205-4
DOI :
10.1109/IRWS.1997.660301