Title :
Complex peripheral Lamb modes in FBARs
Author :
Kaitila, Jyrki ; Larson, John D.
Author_Institution :
Wireless Semicond. Div., Avago Technol., Munich, Germany
Abstract :
In this paper we give experimental observations of the complex valued Lamb mode in a FBAR resonator, using the AIM [1] and standard S-parameter measurements. Furthermore, a theoretical explanation of the observed behavior, based on the Berlincourt formula for the effective coupling coefficient, is offered. This explanation proposes a laterally “self-confined” mode that arises through the mechanical boundary conditions present at the periphery of the resonator structure.
Keywords :
acoustic resonators; surface acoustic waves; Berlincourt formula; FBAR; complex peripheral Lamb modes; coupling coefficient; experimental analysis; resonator structure; self-confined mode; theoretical analysis; Couplings; Dispersion; Electrodes; Film bulk acoustic resonators; Frequency measurement; Resonant frequency; Tungsten; Berlincourt formula; acoustic imaging microscope; complex mode; plate wave dispersion;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0195
