Electromagnetic analysis of an on-chip spiral inductor in the millimeter-wave band

Author

Sumida, T. ; Hirano, Takuichi ; Okada, Kenichi ; Hirokawa, Jiro ; Ando, Makoto

Author_Institution

Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan

fYear

2012

fDate

4-7 Dec. 2012

Firstpage

1277

Lastpage

1279

Abstract

The electromagnetic (EM) modeling and EM simulation technique are discussed for an on-chip spiral inductor in the millimeter-wave band. An excitation modeling with a de-embedding technique using thru and line patterns was discussed in this paper. Simulate results with several excitation models were compared with measured one. It was found that the influence of excitation model is not small and it should be appropriately modeled in the EM simulation. The calculated reflection including pads is closer to the measured one.

Keywords

CMOS integrated circuits; electromagnetic wave propagation; inductors; millimetre wave integrated circuits; CMOS substrate; EM simulation technique; de-embedding technique; electromagnetic modeling; excitation model; millimeter wave band; on-chip spiral inductor; Frequency measurement; Inductors; Semiconductor device measurement; Silicon; Spirals; System-on-a-chip; Transmission line measurements; CMOS substrate; De-Embedding; Electromagnetic modeling; Millimeter-wave; Spiral inductor;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings (APMC), 2012 Asia-Pacific

Conference_Location

Kaohsiung

Print_ISBN

978-1-4577-1330-9

Electronic_ISBN

978-1-4577-1331-6

Type

conf

DOI

10.1109/APMC.2012.6421894

Filename

6421894