An 8×1 micromachined micro-Fresnel lens array for free-space optical interconnect

Author

Lee, S.S. ; Lin, L.Y. ; Pister, K.S.J. ; Wu, M.C. ; Lee, H.C. ; Grodzinski, P.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

1

fYear

1994

fDate

31 Oct-3 Nov 1994

Firstpage

242

Abstract

A micromachined 8 x 1 vertical three-dimensional micro-Fresnel lens array and its hybrid integration with a self-aligned vertical cavity surface emitting laser (VCSEL) array have been demonstrated for the first time. With their unique three-dimensional and array structures, they are suitable for integration with other similarly fabricated micro-optical components such as rotatable mirrors, gratings and beam-splitters as well as other active micro-optical elements. This new technique has great potential for free-space optical interconnects

Keywords

optical fabrication; VCSEL; fabrication; free-space optical interconnect; hybrid integration; micro-optical components; micromachining; self-aligned vertical cavity surface emitting laser array; vertical three-dimensional micro-Fresnel lens array; Lenses; Micromachining; Optical arrays; Optical device fabrication; Optical interconnections; Optical surface waves; Semiconductor laser arrays; Substrates; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE

Conference_Location

Boston, MA

Print_ISBN

0-7803-1470-0

Type

conf

DOI

10.1109/LEOS.1994.586983

Filename

586983