Title :
Improvement of Fast and Precise Positioning of Large-Scale High-Precision Step-Stage Based on Vibration Suppression PTC
Author :
Sakata, Koichi ; Fujimoto, Hiroshi ; Shimoyama, Takachika ; Saiki, Kazuaki
Author_Institution :
Yokohama Nat. Univ., Yokohama
Abstract :
In the positioning system of the large-scale high-precision step-stage, the primary resonance mode appears in low frequency even in the high stiffness stage. The resonance mode is a major obstacle of fast and precise positioning. In this paper, we apply vibration suppression PTC (perfect tracking control) which can control the resonance mode actively on the large- scale stage. Finally, simulations and experiments are performed to show the advantages of the vibration suppression PTC.
Keywords :
large-scale systems; position control; vibration control; large-scale high-precision step-stage; perfect tracking control; positioning system; vibration suppression; Control systems; Fasteners; Frequency; Large-scale systems; Liquid crystal displays; Resonance; Sampling methods; Target tracking; Vibration control; Viscosity;
Conference_Titel :
Industrial Electronics Society, 2007. IECON 2007. 33rd Annual Conference of the IEEE
Conference_Location :
Taipei
Print_ISBN :
1-4244-0783-4
DOI :
10.1109/IECON.2007.4460340
