DocumentCode
3101799
Title
Accurate characteristic impedance measurement on silicon
Author
Williams, D.F. ; Arz, U. ; Grabinski, H.
Author_Institution
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Volume
3
fYear
1998
fDate
7-12 June 1998
Firstpage
1917
Abstract
This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.
Keywords
coplanar waveguides; electric impedance measurement; elemental semiconductors; microstrip lines; microwave measurement; silicon; Si; capacitance; characteristic impedance measurement; conductance; contact pad; coplanar waveguide; fused silica; lossy dielectric; microstrip line; planar transmission line; silicon substrate; Calibration; Capacitance measurement; Coplanar waveguides; Electric variables measurement; Impedance measurement; Microstrip; Parasitic capacitance; Propagation losses; Silicon; Transmission line measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location
Baltimore, MD, USA
ISSN
0149-645X
Print_ISBN
0-7803-4471-5
Type
conf
DOI
10.1109/MWSYM.1998.700955
Filename
700955
Link To Document