Title :
Accurate characteristic impedance measurement on silicon
Author :
Williams, D.F. ; Arz, U. ; Grabinski, H.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Abstract :
This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.
Keywords :
coplanar waveguides; electric impedance measurement; elemental semiconductors; microstrip lines; microwave measurement; silicon; Si; capacitance; characteristic impedance measurement; conductance; contact pad; coplanar waveguide; fused silica; lossy dielectric; microstrip line; planar transmission line; silicon substrate; Calibration; Capacitance measurement; Coplanar waveguides; Electric variables measurement; Impedance measurement; Microstrip; Parasitic capacitance; Propagation losses; Silicon; Transmission line measurements;
Conference_Titel :
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4471-5
DOI :
10.1109/MWSYM.1998.700955
