Title :
High Q SAW resonator using upper-electrodes on grooved-electrodes in LiTaO3
Author :
Kimura, Tomohiro ; Kadota, Mitsuhiro ; Ida, Yasutoshi
Author_Institution :
Murata Manuf. Co., Ltd., Yasu, Japan
Abstract :
Summary form only given. Al-electrodes on 36-48°YX-LiTaO3 substrates have been widely used in surface acoustic wave (SAW) filters and SAW duplexers because of having an optimum electro-mechanical coupling factor, reflection coefficient and good Q-factor. In this paper, authors proposed and constructed a new SAW structure composed of upper Al-electrodes accumulated on lower grooved Cu-electrodes in the LiTaO3 substrate, which has approximately same electro-mechanical coupling factor and reflection coefficient as the Al-electrodes (thickness of 0.1lambda)/36-48°YX-LiTaO3 in order to realize high Q-factor. As the result, the SAW resonator having superior Q-factor was realized compared with that of Al-electrodes(0.1lambda)/42°YX-LiTaO3 substrates.
Keywords :
Q-factor; electromechanical effects; surface acoustic wave filters; surface acoustic wave resonators; LiTaO3; Q-factor; SAW duplexers; grooved-electrodes; high Q SAW resonator; optimum electro-mechanical coupling factor; reflection coefficient; surface acoustic wave filters; upper-electrodes; Acoustic reflection; Acoustic waves; Multiplexing; Passive filters; Q factor; Resonator filters; Surface acoustic waves;
Conference_Titel :
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-6056-4
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2010.5515548
