Title :
Ammonia sensor device using graphene modified with platinum
Author :
Gautam, Madhav ; Jayatissa, Ahalapitiya H.
Author_Institution :
Mech. Ind. & Manuf. Eng., Univ. of Toledo, Toledo, OH, USA
Abstract :
Gas sensing behavior of graphene with platinum nano-particles on graphene films was investigated. Synthesis of graphene was carried out on a copper substrate under the flow of methane and hydrogen gas mixture by a CVD process at the atmospheric pressure. The graphene films were transferred to different substrates after wet etching of the copper substrates. Graphene based device for gas sensing was fabricated using photolithography technique and lift off process. The device showed a better sensitivity when the platinum nano-particles are deposited on graphene surface as compared to graphene without platinum particles.
Keywords :
ammonia; chemical vapour deposition; etching; gas sensors; graphene; nanoparticles; nanosensors; photolithography; platinum; thin film sensors; C-Pt; CVD process; Cu; NH3; ammonia sensor device; atmospheric pressure; copper substrate; gas sensing behavior; graphene based device; graphene film; graphene surface; graphene synthesis; hydrogen gas mixture; methane flow; photolithography technique; platinum nanoparticle; wet etching; Copper; Films; Nanoscale devices; Platinum; Substrates; Temperature sensors;
Conference_Titel :
Semiconductor Device Research Symposium (ISDRS), 2011 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4577-1755-0
DOI :
10.1109/ISDRS.2011.6135380
