• DocumentCode
    3103146
  • Title

    Device design methodology and reliability strategy for deep sub-micron technology [DRAMs]

  • Author

    Divakaruni, Rama ; El-Kareh, Badih ; Tonti, William R.

  • Author_Institution
    IBM Microelectron., Essex Junction, VT, USA
  • fYear
    1997
  • fDate
    13-16 Oct 1997
  • Firstpage
    147
  • Lastpage
    152
  • Abstract
    This tutorial paper discusses device and process optimization techniques that may be employed in the design of current state-of-the-art bulk silicon DRAM technology. MOSFET performance and reliability issues are contrasted
  • Keywords
    DRAM chips; MOS memory circuits; MOSFET; circuit optimisation; integrated circuit design; integrated circuit reliability; DRAMs; MOSFET performance; MOSFET reliability; Si; SiO2-Si; bulk silicon DRAM technology; device design methodology; device optimization; device reliability strategy; process optimization; Boron; Degradation; Design methodology; Doping; High definition video; Hot carriers; Implants; MOSFET circuits; Random access memory; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 1997 IEEE International
  • Conference_Location
    Lake Tahoe, CA
  • Print_ISBN
    0-7803-4205-4
  • Type

    conf

  • DOI
    10.1109/IRWS.1997.660315
  • Filename
    660315