Silicon mirrors and micromirror arrays for spatial laser beam modulation

Author

Dötzel, Wolfram ; Gessner, Thomas ; Hahn, Ramon ; Kaufmann, Christian ; Kehr, Kersten ; Kurth, Steffen ; Mehner, Jan

Author_Institution

Tech. Univ. Chemnitz, Germany

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

81

Abstract

This paper deals with design, technology and experimental investigations of mirrors and micromirror arrays made of monocrystalline silicon. Electrostatically operated twin-directional deflecting mirrors and mirror arrays convenient for continuous scanning with working frequencies between several 100 Hz up to 20 kHz will be presented. An experimental data based method to improve the accuracy of model parameters for simulations and to determine the cross coupling between array cells is new in the field of micromechanics and will be shown

Keywords

elemental semiconductors; integrated optics; mirrors; silicon; spatial light modulators; 100 Hz to 20 kHz; Si; Si mirrors; array cells; continuous scanning; cross coupling; electrostatically operated twin-directional deflecting mirrors; micromechanics; micromirror arrays; mirror arrays; model parameters; monocrystalline silicon; spatial laser beam modulation; Actuators; Electrodes; Frequency; Laser beams; Micromirrors; Mirrors; Optical arrays; Optical modulation; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613587

Filename

613587