Title :
Robust controller design for RTP system using structured uncertainty approach
Author :
Lee, Sang Kyung ; Kim, Jong Hae ; Chang, Oh Do ; Park, Hong Bae
Author_Institution :
Dept. of Comput. Appl. Control, Doowon Tech. Coll., South Korea
Abstract :
In this paper, we propose an robust controller design of rapid thermal processing (RTP) system using the structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a μ controller using the curve fitting method against structured uncertainty. Finally, the simulation results are proposed to show the validity of the proposed method
Keywords :
control system synthesis; curve fitting; integrated circuit manufacture; process control; rapid thermal processing; robust control; sensitivity analysis; temperature control; μ controller; curve fitting; rapid thermal processing; robust control; stability; structured uncertainty; temperature control; weighted mixed sensitivity; Communication system control; Control systems; Ovens; Robust control; Robust stability; Semiconductor device modeling; Temperature control; Temperature sensors; Thermal stresses; Uncertainty;
Conference_Titel :
SICE Annual, 1999. 38th Annual Conference Proceedings of the
Conference_Location :
Morioka
Print_ISBN :
4-907764-13-8
DOI :
10.1109/SICE.1999.788672
