DocumentCode :
3104811
Title :
Long life KrF excimer laser of 5 x 109 shots
Author :
Sugitatsu, A. ; Minamitani, Y. ; Matsushita, Y. ; Minagawa, T. ; Nakatani, H.
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
76
Keywords :
Circuits; Cleaning; Corona; Electrodes; Gas lasers; Laser beams; Laser transitions; Mass production; Optical pulses; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.521314
Filename :
521314
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3104811
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