DocumentCode

3104811

Title

Long life KrF excimer laser of 5 x 10⁹ shots

Author

Sugitatsu, A. ; Minamitani, Y. ; Matsushita, Y. ; Minagawa, T. ; Nakatani, H.

fYear

1995

fDate

10-14 July 1995

Firstpage

76

Keywords

Circuits; Cleaning; Corona; Electrodes; Gas lasers; Laser beams; Laser transitions; Mass production; Optical pulses; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-2400-5

Type

conf

DOI

10.1109/CLEOPR.1995.521314

Filename

521314