DocumentCode

3104992

Title

5 kHz high repetition rate excimer laser

Author

Takagi, Shinichi ; Kakizaki, Ken´ichi ; Okamoto, N. ; Endo, F. ; Ishikawa, Kenji ; Goto, Tetsu

fYear

1995

fDate

10-14 July 1995

Firstpage

76

Keywords

Circuits; Cleaning; Corona; Electrodes; Gas lasers; Laser beams; Laser transitions; Mass production; Optical pulses; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-2400-5

Type

conf

DOI

10.1109/CLEOPR.1995.521315

Filename

521315