• DocumentCode
    3105154
  • Title

    High sensitive micro touch sensor with piezoelectric thin film for micro pipetting works under microscope

  • Author

    Arai, Fumihito ; Motoo, Kouhei ; Fukuda, Toshio ; Katsuragi, Tohoru

  • Author_Institution
    Dept. of Micro Syst. Eng., Nagoya Univ., Japan
  • Volume
    2
  • fYear
    2004
  • fDate
    April 26-May 1, 2004
  • Firstpage
    1352
  • Abstract
    Isolation and separation of the target microbe is quite important. We propose a new touch sensor for separation of the target microbe on the plate using a micromanipulator with the glass pipette. Principle of this touch sensor is based on detection of mechanical impedance change after contact of the vibrating pipette tip with the plate. We improved the fixation method of the sensor with the pipette as well as electrode design of the sensor. We performed the FEM analysis to improve sensitivity of this sensor. The prototype sensor has high sensitivity and high rigidity and is excellent in durability. This sensor is sensitive enough to protect the fragile pipette tip from abrupt collision. Thus, separation task of the microbe by the micromanipulator under the microscope is improved.
  • Keywords
    finite element analysis; micromanipulators; microorganisms; microsensors; piezoelectric thin films; tactile sensors; FEM analysis; electrode design; finite element method; fixation method; fragile pipette tip; glass pipette; high sensitive micro touch sensor; mechanical impedance detection; micro pipetting; micromanipulators; piezoelectric thin film; prototype sensor; target microbe; vibrating pipette tip; Electrodes; Glass; Impedance; Mechanical sensors; Micromanipulators; Microscopy; Performance analysis; Piezoelectric films; Prototypes; Tactile sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Automation, 2004. Proceedings. ICRA '04. 2004 IEEE International Conference on
  • ISSN
    1050-4729
  • Print_ISBN
    0-7803-8232-3
  • Type

    conf

  • DOI
    10.1109/ROBOT.2004.1308012
  • Filename
    1308012