DocumentCode
3105321
Title
Reliability characterization of MOVPE grown n-GaInP/p-GaAs heterojunctions vis-a-vis high temperature operation through photoreflectance spectroscopy, transmission electron microscopy and deep level transient spectroscopy
Author
Madra, Satbir
Author_Institution
WJ Commun., Inc, San Jose, CA, USA
fYear
2004
fDate
24 Oct. 2004
Firstpage
11
Lastpage
19
Abstract
The paper presents a detailed characterization of the lattice-matched n-GaInP/p-GaAs heterostructures, including the evolution of the heterojunction and its departure from the initial state under elevated temperatures and current stress. GaInP/GaAs heterojunctions, which constitute the emitter-base junction for contemporary HBTs, were generated using MOVPE. Photoreflectance spectroscopy (PR) has been used to determine the GaInP ordering and bandgap energy, while cross-section TEM has been used to determine the GaInP/GaAs interface region for evidence of defects. p-n tunnel diode samples were generated and characterized to determine the rate of carbon diffusivity under temperature and current induced effects, to provide quantitative measurement of degradation of HBT base layer as seen from carbon precipitate-type artifacts from XTEM analysis. Moreover, n-GaInP/p+-GaAs diodes were generated for deep-level transient spectroscopy (DLTS) to gain information on traps and trap kinetics from current-stress. The data from the various characterization techniques is utilized to provide the degradation mechanisms for n-GaInP/p-GaAs HBTs. While no evidence of dislocations at the GaInP/GaAs interface was found in our samples, a model for determination of the relaxation time for dislocation scattering is also presented.
Keywords
III-V semiconductors; MOCVD; carbon; dislocation scattering; electron traps; energy gap; gallium compounds; heterojunction bipolar transistors; hole traps; indium compounds; photoreflectance; semiconductor device reliability; transmission electron microscopy; tunnel diodes; C; DLTS; GaInP-GaAs; HBT; HBT base layer degradation; MOVPE grown heterojunctions; XTEM; bandgap energy; carbon diffusivity; carbon precipitate-type artifacts; cross-section TEM; current induced effects; current stress; deep level transient spectroscopy; dislocation scattering relaxation time; heterojunction reliability characterization; high temperature operation; interface region defects; lattice-matched heterostructures; p-n tunnel diodes; photoreflectance spectroscopy; temperature induced effects; transmission electron microscopy; trap kinetics; Degradation; Diodes; Epitaxial growth; Epitaxial layers; Gallium arsenide; Heterojunctions; Spectroscopy; Stress; Temperature; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
ROCS Workshop, 2004.[Reliability of Compound Semiconductors]
Print_ISBN
0-7908-0105-1
Type
conf
DOI
10.1109/ROCS.2004.184340
Filename
1424931
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