Title :
Wave optical measurement for industry
Keywords :
Apertures; Etching; Holographic optical components; Holography; Integrated optics; Lenses; Magnetic heads; Mirrors; Optical polarization; Particle beam optics;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.521335