DocumentCode
3106646
Title
Wave optical measurement for industry
Author
Yamaguchi, I.
fYear
1995
fDate
10-14 July 1995
Firstpage
89
Keywords
Apertures; Etching; Holographic optical components; Holography; Integrated optics; Lenses; Magnetic heads; Mirrors; Optical polarization; Particle beam optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-2400-5
Type
conf
DOI
10.1109/CLEOPR.1995.521335
Filename
521335
Link To Document