• DocumentCode
    3106792
  • Title

    High repetition rate KrF excimer laser for microphotolithography

  • Author

    Kakuno, T. ; Enami, Toshio ; Kakizaki, Ken´ichi ; Enami, Toshio

  • fYear
    1995
  • fDate
    10-14 July 1995
  • Firstpage
    94
  • Keywords
    Fault location; Gas lasers; Lamps; Light sources; Optical pulses; Power engineering and energy; Power generation; Power lasers; Production; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-2400-5
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1995.521342
  • Filename
    521342
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3106792