• DocumentCode
    310850
  • Title

    Application Of Damage Measurement Techniques To A Study Of Antenna Structure Charging

  • Author

    Gabriel, Calvin T. ; Educato, James L.

  • Author_Institution
    VLSI Technology, Inc.
  • fYear
    1997
  • fDate
    13-14 May 1997
  • Firstpage
    91
  • Lastpage
    94
  • Keywords
    Antenna measurements; Current measurement; Gate leakage; Leakage current; Measurement techniques; Plasma measurements; Plasma sources; Stress measurement; Testing; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Process-Induced Damage, 1997., 2nd International Symposium on
  • Conference_Location
    Monterey, California, USA
  • Print_ISBN
    0-9651-5771-7
  • Type

    conf

  • DOI
    10.1109/PPID.1997.596702
  • Filename
    596702
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=310850