DocumentCode :
310850
Title :
Application Of Damage Measurement Techniques To A Study Of Antenna Structure Charging
Author :
Gabriel, Calvin T. ; Educato, James L.
Author_Institution :
VLSI Technology, Inc.
fYear :
1997
fDate :
13-14 May 1997
Firstpage :
91
Lastpage :
94
Keywords :
Antenna measurements; Current measurement; Gate leakage; Leakage current; Measurement techniques; Plasma measurements; Plasma sources; Stress measurement; Testing; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Process-Induced Damage, 1997., 2nd International Symposium on
Conference_Location :
Monterey, California, USA
Print_ISBN :
0-9651-5771-7
Type :
conf
DOI :
10.1109/PPID.1997.596702
Filename :
596702
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=310850
بازگشت