DocumentCode
310973
Title
A custom computing solution to automated visual inspection of silicon wafers
Author
Athanas, Peter ; Abbot, L. ; Cherbaka, Mark ; Pudipeddi, Bharadwaj ; Paar, Kevin
Author_Institution
Dept. of Electr. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA
fYear
1997
fDate
12-14 Apr 1997
Firstpage
315
Lastpage
319
Abstract
This paper illustrates, through a specific example, the utility and effectiveness of using the reconfigurable capabilities of an FPGA-based custom computing platform as part of an industrial inspection system. The inspection task examined is typical of many industrial inspection tasks which require the identification of several different types of failures of products on a manufacturing assembly line. Like many inspection tasks, a number of features must be examined-each of which may require unique signal processing. A custom computing platform can provide the demanding signal processing performance while maintaining the capability of rapidly reconfiguring for an assortment of tasks
Keywords
automatic optical inspection; automatic testing; field programmable gate arrays; image processing; integrated circuit manufacture; integrated circuit testing; silicon; FPGA based custom computing platform; Si; automated visual inspection; custom computing solution; industrial inspection system; manufacturing assembly line; product failure identification; reconfigurable capabilities; signal processing; silicon wafers; Computer industry; Electrical products industry; Engines; Field programmable gate arrays; Foundries; Image processing; Inspection; Manufacturing industries; Signal processing; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Southeastcon '97. Engineering new New Century., Proceedings. IEEE
Conference_Location
Blacksburg, VA
Print_ISBN
0-7803-3844-8
Type
conf
DOI
10.1109/SECON.1997.598701
Filename
598701
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