Title :
Use of method for chemical etching for identification of structure of proton exchange channel waveguides fabricated on Z-cut of lithium niobate crystal
Author :
Kichigin, Vladimir I. ; Mushinsky, Sergey S. ; Petukhov, Igor V. ; Shevtsov, Denis I. ; Volyntsev, Anatoly B.
Author_Institution :
Perm State Univ., Perm, Russia
fDate :
June 30 2011-July 4 2011
Abstract :
It was established by chemical etching that proton exchange on the surface of LN +Z cut in the molten benzoic acid at the temperature of 190°...210°C during 1...4 h causes fabrication of channel waveguides, consisting of 3 proton exchange phases.
Keywords :
etching; ion exchange; lithium compounds; waveguides; LN +Z cut; chemical etching; lithium niobate crystal Z-cut; molten benzoic acid; proton exchange channel waveguides; proton exchange phase; temperature 190 degC to 210 degC; time 1 h to 4 h; Chemicals; Crystals; Etching; Lithium niobate; Optical waveguides; Planar waveguides; Protons; Lithium niobate; chemical etching; proton exchange;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-61284-793-1
DOI :
10.1109/EDM.2011.6006898
