Title :
Optimization of surface treatment of SOI-nanowire sensors
Author :
Malyarenko, Nikolay F. ; Naumova, Olga V. ; Zhanaev, Erdem D. ; Popov, Vladimir P.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fDate :
June 30 2011-July 4 2011
Abstract :
Several types of chemical treatment aimed at removing surface contamination and stabilizing charge state of SOI-NW sensors were tested. The effective charge on the surface allowing to select the optimal treatment of the sensor surface after prolonged storage was selected.
Keywords :
nanowires; sensors; silicon-on-insulator; surface contamination; surface treatment; SOI-NW sensors; SOI-nanowire sensors; Si; charge state; chemical treatment; sensor surface; surface contamination; surface treatment; Chemical sensors; Nanobioscience; Sensor phenomena and characterization; Silicon; Surface contamination; Surface treatment; SOI nanowire sensors; surface treatment;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-61284-793-1
DOI :
10.1109/EDM.2011.6006910
