• DocumentCode
    3111607
  • Title

    Very high density probing

  • Author

    Barsotti, C. ; Tremaine, S. ; Bonham, M.

  • fYear
    1988
  • fDate
    12-14 Sep 1988
  • Firstpage
    608
  • Lastpage
    614
  • Abstract
    A discussion is presented on some of the problems encountered with probing at the wafer level and how this probe card technology helps to overcome those problems. Advancements needed in probe card technology include smaller pitches, faster speeds, bumped pads, internal and multidie probing. With the density of the die increasing, the pitch between pads on the die is being reduced. A pitch of 4 mils or less is common for faster, more complex devices, resulting in an almost unlimited growth of signal pins. Tape automated bonding (TAB) necessitates that bumps be placed on the pads of the die. Bumped pads must then be probed. Internal and multidie probing, although not a recent development, is being requested more often to help improve throughput
  • Keywords
    VLSI; integrated circuit testing; lead bonding; packaging; probes; bumped pads; high density probing; internal probing; lead bonding; multidie probing; pitch; probe card technology; speeds; tape automated bonding; throughput; wafer level; Blades; Ceramics; Circuit testing; Costs; Impedance; Packaging; Probes; System testing; Throughput; Wafer scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Conference, 1988. Proceedings. New Frontiers in Testing, International
  • Conference_Location
    Washington, DC
  • ISSN
    1089-3539
  • Print_ISBN
    0-8186-0870-6
  • Type

    conf

  • DOI
    10.1109/TEST.1988.207843
  • Filename
    207843