Title :
Simulation of an atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon (DLC) film deposition
Author :
Farouk, T. ; Farouk, B. ; Gutsol, A. ; Fridman, A.
Author_Institution :
Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, USA
Abstract :
A hybrid model has been developed to simulate atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon deposition. The simulation predicts CH2, CH3 and C2H2 as the predominant growth species for diamond like carbon deposition. A strong dependence of soot formation on gas temperature is observed. The results further indicates that the quality of the deposited film have strong dependence on discharge current.
Keywords :
Atmospheric modeling; Atmospheric-pressure plasmas; Diamond-like carbon; Electron mobility; Glow discharges; Plasma applications; Plasma chemistry; Plasma simulation; Plasma sources; Plasma temperature;
Conference_Titel :
Pulsed Power Conference, 2007 16th IEEE International
Conference_Location :
Albuquerque, NM
Print_ISBN :
978-1-4244-0913-6
Electronic_ISBN :
978-1-4244-0914-3
DOI :
10.1109/PPPS.2007.4651943
