Title :
Micromechanical IR-systems
Author :
Kuryshev, Georgy L.
Author_Institution :
A.V. Rzhanov Inst. of Semicond. Phys., SB RAS, Novosibirsk, Russia
fDate :
June 30 2011-July 4 2011
Abstract :
The results of experimental investigation of the membrane matrix mikrofotoconvectors, operation of which is based on the mechanical movement of the membrane plane are presented. The possibility of thermal radiation registration by optical methods in the visible spectrum was shown.
Keywords :
matrix convertors; micro-optomechanical devices; membrane matrix mikrofotoconvectors; membrane plane; micromechanical IR-systems; optical methods; thermal radiation registration; visible spectrum; Metals; Optical films; Optical imaging; Optical sensors; Production; Substrates; Infrared; hybrid; membrane;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-61284-793-1
DOI :
10.1109/EDM.2011.6006938
